ປະ​ເພດ​ຄຳ​ຮ້ອງ
Patent - Foreign
ປະ​ເພດ​ຄຳ​ຮ້ອງຍ່ອຍ
Patent - PCT National Phase
(10) ເລກທີ ແລະ ວັນທີການຈົດທະບຽນ
ສະຖານະ
Filed
(180) ມື້​ໝົດ​ອາຍຸ
(20) ​ເລກທີ ​ແລະ ມື້ ຍື່ນ​ຄຳ​ຮ້ອງ
LA P/818 03.07.2020
(40) ​ເລກທີ ​ແລະ ວັນ​ທີ​ເຜີຍ​ແຜ່
(86) ເລກທີ ແລະ ວັນທີ ເອກະສານ PCT
(87) and Date ເລກທີ ແລະ ວັນທີ່ ເຜີຍແຜ່ PCT
(85) ວັນ​ທີເອກະສານ​ເຂົ້າ
(30) ລາຍລະອຽດບຸລິມະສິດ
(72) ຜູ້​ປະດິດສ້າງ
(LA) KITAMOTO Hideo : c/o Kudamatsu Plant, Toyo Kohan Co., LTd., 1302-1, Higashitoyoi, Kudamatsu-shi, Yamaguchi, 7448611 JAPAN
(LA) SHIOMICHI Yukimasa : c/o Kudamatsu Plant, Toyo Kohan Co., LTd., 1302-1, Higashitoyoi, Kudamatsu-shi, Yamaguchi, 7448611 JAPAN
(LA) SUGIMURA OsaMU : c/o Kudamatsu Plant, Toyo Kohan Co., LTd., 1302-1, Higashitoyoi, Kudamatsu-shi, Yamaguchi, 7448611 JAPAN
(74) ຊຶ່ບໍລິສັດຕົວແທນ
(LA) Tilleke & Gibbins Lao Co., Ltd : No. 302, 3rd Floor, Vieng Vang Tower, Unit 15, Boulichan Road, Dongpalan Thong Village, Sisattanak District, Vientiane Capital, Lao PDR
(54) ຫົວຂໍ້
(LA) CONTROL SYSTEM FOR DOUBLE-SIDE POLISHING APPARATUS, CONTROL APPARATUS, AND METHOD FOR PRODUCING SUBSTRATE
(EN) CONTROL SYSTEM FOR DOUBLE-SIDE POLISHING APPARATUS, CONTROL APPARATUS, AND METHOD FOR PRODUCING SUBSTRATE
(57) ບົດສັງເຂບ
(LA)

The present invention addresses the problem of providing a control system of a double-sided polishing device, a control device, and a method for producing a substrate with which it is possible to quickly control the flatness of a substrate with a high degree of precision by controlling polishing conditions. The present invention is a control system of a double-sided polishing device 10 that sandwiches a body W to be polished between an upper face plate 21 and a lower face plate 32 and that polishes a TOP surface 30a and a BOT surface 30b of the body W to be polished by causing the upper face plate and the lower face plate to rotate, wherein the control system is characterized in that: each of a TOP surface work amount PT (Ws) required in polishing of the TOP surface 30a, and a BOT surface work amount PB (Ws) required in polishing of the BOT surface 30b, are calculated; and polishing conditions are controlled so that the difference between the calculated TOP surface work amount PT and BOT surface work amount PB is kept within a prescribed range.

(58) ການ​ຮຽກຮ້ອງ
ປະເພດຂອງເອກະສານ ວັນທີ ການດໍາເນີນການ
ຊື່ຂອງລາຍການວັນ​ທີສະຖານະ
Filing03.07.2020Filed
PCT National Phase Entry10.01.2022PCT National Phase