A substrate arrangement assisting  2l jig  includes: a plate  -shaped  that has a plurality of standby holes that are provided in correspondence with 5 positions of the plurality of substrate holding holes in the carrier and in which substrates are arrangeablei and claw portions
that protrude from at least one position on an edge ofeach ofthe standby holes and
hold the substrates whi-Ie being in contact with outer circumferential ends ofthe substrates. In a state where the substrates are held respectively in the standby holes as a result ofthe claw
portions \O being caused to protrude, the  jig  jig  main body main body is moved to a position
above the carrier and the claw portions are retracted to release the substrates from the respective
standby holes and cause the substrates to fall and be arranged respectively in
the substrate holding holes in the carrier located below.